Semiconductor Manufacturing Process
A hot water supply system for ultra-pure water that is ideally suited for point-of-use for rinsing of silicon wafers and glass substrates of liquid crystal displays.
Features
- Clean
Heating vessels through which water-flow and all plumbing pipes are respectively made of high-purity quartz glass and fluorocarbon polymer. - Compact
Slim and compact unit requires minimal foot print for installation at the point of use. - Excellent temperature control
High power of halogen lamps quickly raise the temperature and adjust it in response to variations in the water flow rate. - High efficiency
Efficiency with than 95%. - Safety
Optimum operational safety is provided through displays and sound alarms against abnormal conditions such as overheating, uncharged heating, excessive pressure and leakage of water.
Specification
| Model | PWH-24i | PWH-48i | PWH-72i | PWH-96i | PWH-144i | ||
| Heating method | Radiation heating with near infrared rays | ||||||
| Heater wattage | 24kW | 48kW | 72kW | 96kW | 144kW | ||
| Standard flow rale(at 55℃） | 6L/min. | 12L/min. | 18L/min. | 24L/min. | 36L/min. | ||
| Minium heating flow rate | 2L/min. | 5L/min. | 10L/min. | ||||
| Temperature setting range | 25to85℃ | ||||||
| Temperature control accuracy | ±1℃ | ||||||
| Flow meter indication range | 0to10L/min. | 0to50L/min.(Not the guaranteed range of temperature control accuracy) | |||||
| Heater | Halogen lamp. Indirect heating without direct contact with water | ||||||
| Heating vessels material | High-purity transparent quartz | ||||||
| Wetted materials of the piping | Fluorocarbon polymer | ||||||
| Safety functions | Water temperature over-rise,boil-dry,water leakage,sensor disconnection,and lamp breakage.Operation stop,alarm,indication when abnormality is detected.Alarm output via open collector | ||||||
| External communication function | RS-232C/RS-485(option) | ||||||
| External input/output function | 8-input/14-output signal(Varies depending on specification) | ||||||
| Overall dimensions(mm) | W340×D850×H1384 | W340×D850×H1384 | W340×D850×H1584 | W340×D850×H1986 | W340×D850×H2004 | ||
